VTT Technical Research Centre of Finland Ltd
Processing platform
2600 m2 class ISO4-ISO6 cleanroom (national research infrastructure status) for active devices, RF-MEMS, photonics, superconducting devices and nanofabrication. Wafer size 150 and 200 mm.
Modelling platform
Silvaco process and device modelling tools, RF modelling tools: Keysight ADS, AWR MWO, HFSS, Sonnet, IE3D
Characterization platform
Characterization tools for structural (SEM, AFM, X-ray), electrical (10 mK-RT), including Millimetre wave laboratory of Finland (MilliLab, an ESA external laboratory on millimetre wave technology, frequencies up to 3 THz), and optical properties.