Uppsala University

Uppsala University

Contact persons:

Professor Zhen Zhang


Uppsala University

St. Olofsgatan 10 B

SE-751 05 Uppsala,

SWEDEN

Cleanroom:

State-of-art CMOS process line with EBL (~10 nm capability)

Commercial TCAD software packages :

  • Silvaco,
  • ISE/Synopsys,
  • Cadence,
  • Fluent,
  • Comsol Multiphysics,
  • etc.
  • Physical:
    • Titan-TEM,
    • dual-beam FIB,
    • HR-SEM,
    • XPS,
    • Raman,
    • AFM,
    • etc.
  • Electrical:
    • State-of-art parameter analyzers (2 pieces of Agilent B1500A),
    • Low-frequency noise in electrolytes (Keysight ALFNA E4727A),
    • Axopatch 200B for low-noise ionic current,
    • Stations for electrochemistry
    • High-frequency up to 325 GHz
    • etc.