University of Twente
Contact persons:
Ray Hueting
University of Twente
Drienerlolaan 5
7522 NB Enschede
Netherlands
Processing platform
The University of Twente has a Nanolab facility comprising a 1200 m2 clean room for Nanotechnology experimentation with world class equipment.
Available equipment :
- Many tools including deposition tools (ALD, CVD and PLD), e-beam lithography, nanoimprint, implanter, sputter tools
- Many physical characterization tools including HRSEM, Dualbeam FIB, TEM, XRD, XPS, nanoprober, AFM, In situ spectroscopy in CVD/ALD
We are fully equipped for:
- Silicon process integration
- MEMS, microfluidics, silicon photonics
- Nanotechnology
Modelling platform
Silvaco, Synopsys, COMSOL
Characterization platform
- Wafer level DC and RF (up to ~100 GHz) electrical characterization
- Visible and infrared light emission characterization
- Chip level cryostatic characterization