INL

INL – International Iberian Nanotechnology Laboratory

Contact persons:

Clivia Sotomayor-Torres

International Iberian Nanotechnology Laboratory
Avenida Mestre José Veiga s/n
4715-330 Braga
Portugal

Equipment / Facilities

Processing platform

Thin Film Deposition and Material Growth:
- Molecular beam epitaxy of InSe, GaSe, In2Se3 2D materials
- Multi-target Singulus sputtering tool for magnetic tunnel junctions and thin-film multilayers (Timaris MTM)
- Multi-target confocal sputtering tool (Kenosistec)
- Metallization Singulus sputtering tool for Al, TiW(N) and Al2O3 (Timaris FTM)
- EasyTube 3000 Graphene CVD furnace system
- SPTS MPX CVD system for oxides, oxi:nitrides and a-Si:H deposition
- PECVD (800ºC) systems for CNT and carbon layers deposition tool (MicroSys 400 from Roth & Rau Microsystems)
- Cu Electroplating (AMMT GmbH)
- Atomic Layer Deposition (Beneq TFS 200)
Etching, Ashing, and Micromachining
- Broad Beam ion milling with SIMS end point detect (Nordiko 7500)
- Fluorine-based reactive ion etch system for oxides / nitrides (SPTS APS)
- Chlorine-based reactive ion etch systems for metals (SPTS ICP and SPTS C2L ICP)
- Silicon Deep reactive ion etching system (SPTS Pegasus)
- Plasma asher (PVA TEPLA M360)
- TMAH / KOH Si etch tanks (AMMT GmbH)
- Multiple fume hoods and wet benches for chemical processes (Quimipol)
- Oxide vapour etch release system (SPTS/PRIMAXX uEtch)
- XeF2 isotropic Si etch system (Xactic X4)
- Supercritical CO2 point dryer (Tousimis)
Optical and E-beam Lithography
- E-beam lithography tool (Vistec 5200 ES 100 kV)
- Nanoimprint Lithography (Obducat Eitre8)
- Direct write laser lithography (Heidelberg DWL 2000)
- Mask aligner (Karl Suss MA BA model)
- Optical resist track (Karl Suss Gamma Cluster)
- E-beam resist track (Karl Suss Gamma Cluster)
- Multiple ovens, including vapour priming
- Coater and hotplates for substrates up to 300 mm (SCS/EMS)
- Custom and uFab (Newport) femtosecond laser based 3D microfabrication (microprinting)
Advanced Packaging, Annealing, and Back-end Processes
- Chemical Mechanical Planarization (Logitech ORBIS)
- Dicing saw (Disco DAD 3500)
- Wire Bonder / Aluminium Wedge, Pick and Place (TPT HB)
- Wire Bonder / Gold ball bond (TPT HB)
- Pick and place (Finetech Fineplacer Sigma)
- Advanced desktop research printer (LP50 Roth & Rau B.V.)
- Magnetic Annealer with field up to 2T and temperature up to 400C (TEL, MATR 2000)
For more information: https://inl.int/services/research-core-facilities/micro-and-nanofabrication/

Modelling platform

Ansys Lumerical
Raytracing (Zemax)

Characterization platform

- Conventional Transmission Electron Microscope (TEM): JEOL JEM-2100
- Probe corrected Scanning Transmission Electron Microscope (STEM): FEI Titan ChemiSTEM
- Double corrected TEM/STEM: FEI Titan Cubed Themis coupled with EELS, a segmented detector, a pixelated detector, a heating/biasing holder, a cryo holder, a liquid holder, a gas holder and a tomography holder.
- Dedicated Cryo-TEM: Thermo Scientific Glacios
- Scanning Electron Microscope (SEM)/Environmental SEM: FEI Quanta 650 FEG
- DualBeam Focused Ion Beam (FIB)-SEM: FEI Helios NanoLab 450S
- X-Ray Photoelectron Spectrometer: Thermo Scientific Escalab 250Xi
- Full-equipped sample preparation laboratory
More information: https://inl.int/wp-content/uploads/2024/01/INL_BROCHURES_AEMIS.pdf

Metrology, Inspection, and Wafer-Scale Device Testing
- High-resolution SEM (NanoSEM, FEI)
- Contact profilometer (KLA TENCOR P-16+)
- Resistivity mapper (AITCO)
- Optical profilometer/ellipsometer (OPM hyperion with confocal sensor / Ocean Optics NanoCalc XR)
- Multiple automated wafer probers for electrical testing and others
- Radio Frequency Electrical Characterization Laboratory (up to 40Ghz in frequency domain and 20GHz in time domain)
- Manual and motorized optical microscopes for Automatic Optical Inspection
Advanced multispectral microscopy setups:
- Custom developed Optical Decetected Magnetic Resonance (ODMR setups for quantum metrology) in widefield and confocal microscopes
- Fluorescence Lifetime Imaging (FLIM) microscopy setups
- Nonlinear SHG and MP-FLIM microscopy
- Streak imaging (spectral temporal characetrization)

Expertise

		Main Expertises
Beyond CMOS	Neuromorphic Computing	Beyond CMOS Neuromorphic Computing • Design, fabrication and characterisation of spintronic neural networks, with magnetic tunnel junctions acting as both neuron and synapse component as part of several ongoing EU projects III-V nanophotonic devices; nanoLEDs, nanolasers, nano-photodetectors for neurosynaptic devices; polymer photonic devices and 2D/3D interconnects; • Designing multifunctional and reprogrammable nanodevices for spintronic neural networks operating in the frequency domain Design of nanophotonic devices; design optical interconnects; neuromorphic optical sensing and computing; nonlinear dynamical systems; spiking neural networks
	Phonon engineering	Nanoscale thermal transport Phonon waveguides and circuits Optomechanics
	Small slope switches-NW/TFET/NEMS	x
	Alternative materials-2D layers	Simulation of electronic, optical and magnetic properties of 2D materials (graphene, transition metal dichalcogenides, chromium trihalides, magnetic 2D materials) Fabrication of Graphene field-effect transistors at the wafer scale; integration of graphene material into classical cleanroom techniques. Fabrication of optoelectronic devices based on InSe, GaSe, In2Se3 2D materials Advanced characterization of 2D materials to determine their atomic structure-composition, phases, electric-field and charge distribution.
	Novel devices for ultra-low power	Transition metal dichalcogenide memristors
	1D	Fabrication, characterization and modelling 1D van der Waals Heterostructures Correlating magnetic behavior with structure, understanding structural phase transitions
	Quantum Technologies & Very low temperature electronics	Using quantum computers for quantum simulation Single-photon emitters from h-BN Quantum sensing based on Nitrogen Vacancy centers in diamond Growth and characterization of topological insulators
More Moore	Logic Nanodevices & circuits	x
	Memories	2D materials memristors Smart interconnects
	Very low power devices	Passive MEMS inertial logger (configurable low power inertial switch)
	High temperature electronics	x
More than Moore	Photonic devices	III-V nanophotonic devices; nanoLEDs, nanolasers, nano-photodetectors; polymer photonic devices: MZM modulators; 3D optical waveguides, quantum sensing platforms based on diamond
	Micro-nano-bio Sensors & Systems	Graphene field-effect transistors designed for biosensing with aptamers, DNA, antibodies Microneedles for drug delivery and fluid sampling Microfluidic devices for biomarker isolation from body fluids Optofluidic devices: integrating optical and plasmonic (SERS) sensors in microfluidic devices for biomolecule analysis. Organ-on-a-chip devices and systems Measuring devices based on SERS-based sensors integrating sample preparation, microfluidics and selective detection and quantification Measuring devices based on electrochemical sensors integrating sample preparation, microfluidics and selection detection and quantification
	Energy Harvesting	Wireless energy harvesting Triboelectric and electrostatic energy harvesting
	RF devices & circuits	Magnetic tunnel junctions used for a range of rf functions, including rf sources, detectors, filters, random number generation, PUFs
	THz spectrum	Micro optics for THz spectrum applications (beam shaping, splitting, polarizers) Modelling THz spin excitons in magnetic 2D materials and magnetic molecules Modelling graphene plasmons in the THz and their coupling to magnons
	Photonics devices	Fabrication of 2D materials single-photon emitters (hBN) High frequency (1MHz) MEMS-based optical modulator Integrated Photonics Devices e.g. for biosensing, quantum information and neuromorphic photonic computing
	Power devices	x
	Flexible electronics	Flexible (capacitive and resistive) pressure and temperature sensors, polymer-embedded passive components (microinductors), chip-on-flex integration and packaging Flexible piezoelectrets for self-powered sensing application
Smart systems& Systems design	Smart systems	IoT and Smart Cities: Smart Homes and Buildings: Smart Grids Industry 4.0 and smart manufacturing processes. Predictive maintenance and condition monitoring in industries. Artificial intelligence and machine learning for smart systems. AI for optofluidics control and analysis. Embedded Systems Cloud Computing Cyber-Physical Systems IoT (Internet of Things) Edge computing for IoT devices Communication protocols and standards for IoT Human-Computer Interaction (HCI) Machine Learning Systems Harvesting/passive sensors system integration
Smart systems& Systems design	Systems design	Ultra high sensitivity: Pull-in transduction mechanism for inertial MEMS

Research interests

		Research interests
Beyond CMOS	Neuromorphic Computing	Designing multifunctional and reprogrammable nanodevices for spintronic neural networks operating in the frequency domain Design of nanophotonic devices; design optical interconnects; neuromorphic optical sensing and computing; nonlinear dynamical systems; spiking neural networks
	Phonon engineering	Low energy interconnect Non-charge based state variables Variability, fluctuations and noise
	Small slope switches-NW/TFET/NEMS	x
	Alternative materials-2D layers	Modelling excitations (magnons, excitons, plasmons) in 2D materials. Modelling proximity effects in 2D materials Graphene chemical sensors (biological sensors, gas sensors); graphene radiofrequency devices for communication Fabrication of optoelectronic devices based on InSe, GaSe, In2Se3 2D materials Using HAADF STEM, STEM-EELS, DPC-STEM and COM-STEM to understand 2D materials at the atomic level. Aberration Corrected STEM and Spectroscopy, Low T Cryo-TEM and Insitu TEM
	Novel devices for ultra-low power	TMDC materials and devices
	1D	Electronic and magnetic properties of single wall nanotubes of ferromagnetic materials (ex: CrX3) encapsulated in multiwall carbon nanotubes Aberration Corrected STEM and Spectroscopy Low T Cryo-TEM and Insitu TEM
	Quantum Technologies & Very low temperature electronics	Develop novel quantum metrology technologies for material and biological sensing applications Graphene/h-BN chip for photon emission on-demand Electric current-to-spin current conversion efficiency Use aberration corrected STEM to create defects ranging from pairs of vacancies to antidot lattices
More Moore	Logic Nanodevices & circuits	x
	Memories	2D materials devices Printed Memristor for memory application Integrated photonic neuromorphic computing hardware
	Very low power devices	Modelling and fabricating passive and latching MEMS structures to stick when reaching certain acceleration values, and reset them through powered actuation
	Photonic devices	Optoelectronics, nanophotonics, III-V compound semiconductors; design of optical active devices; nanofabrication; two-photon polymerization, quantum metrology for thermometry and magnetometry
More than Moore	micro-nano-bio Sensors & Systems	Quantification of small molecules (dopamine, GABA, serotonin), detection of genetic biomarkers of cancer (glioma), diagnostic of infectious diseases (malaria, respiratory infections) Less invasive drug delivery and diagnostics (microneedle with integrated sensors for wearable diagnostics) Diagnosis, prognosis and prediction of diseases: cancer, metabolic, inflammatory, neurodegenerative. Plasmonic devices efficient, robust and mid mass-scale development and fabrication. Understanding biology of diseases by developing novel organ-on-a-chip devices that integrate nano-based sensors. Development of SERS- and electrochemical-based measuring devices for water contaminants monitoring: early warning systems, portable and automated platforms, AI/ML applied to sensors’ analytics
	Energy Harvesting	Novel spintronic based rectifiers targeting low power operation Energy Harvesters for wearables
	RF devices & circuits	Explore novel radiofrequency functionality of nanoscale devices which convert magnetic properties (i.e. resonance) for electrical devices (i.e. rf detectors)
	THz spectrum	Design and modelling of micro optics for this domain
	Photonics devices	Quantum communication (?) PICs for biosensing, quantum information and neuromorphic photonic computing
	Flexible electronics	x
	Smart systems	Wearable devices for health monitoring and diagnostics. Telemedicine and remote patient monitoring. Smart logistics and supply chain management. Industry 4.0 and smart manufacturing processes. Predictive maintenance and condition monitoring in industries. Artificial intelligence and machine learning for smart systems. Edge-based machine learning for low-latency applications. Accessibility and inclusivity in smart technologies. Embedded Systems Cloud Computing Cyber-Physical Systems IoT (Internet of Things) Edge computing for IoT devices Communication protocols and standards for IoT Human-Computer Interaction (HCI) Machine Learning Systems
	System design	Ultra high sensitivity: Pull-in approach to increase robustness to 1/f noise sources and increase bias stability to achieve ultra-low g resolution.

INL – International Iberian Nanotechnology Laboratory

SiNANO Institute