Chair for Micro - and Nanoelectronics at RWTH Aachen University

Chair for Micro – and Nanoelectronics at RWTH Aachen University

Contact persons:

Max Lemme

RWTH Aachen

Templergraben 55
52062 Aachen

Germany

Equipment / Facilities

Processing platform

Dielectric deposition: LPCVD, ALD (Si₃N₄, SiO₂, Al₂O₃)
Thin film deposition: E-Beam evaporation, Sputtering (Al, Ti, TiN, W, Ni, Cr, Co, HfO₂)
2D material deposition: CVD (graphene), ALD, PECVD
Pattern transfer: ICP/RIE (anisotropic profiles, smooth surfaces, F and Cl based etch chemistry)
Lithography: E-Beam lithography, Optical lithography (6” Mask Aligner, 6” I-line stepper), Interference lithography, Nanoimprint lithography
Wet chemistry
Critical point drying
Wafer dicing

Modelling platform

Lumerical FDTD (Photonics, Sensors)
Ansys Electronics HFSS (Photonics)
Phoenix OptoDesigner (Photonics)

Characterization platform

Automated SEM
Raman spectroscopy (532 nm, 637nm, 785 nm laser): Photo luminescence, photo current mapping, in-situ pressure/humidity
Electrical characterization: temperature range (20 K -600 K), DC, RF (up to 110 GHz)
Optical characterization: Light sources with 850 nm, 1310 nm, 1550 nm, tunable sources, electro optic, temperature rang (20 K – 600 K)
Spectroscopic ellipsometry
Atomic force microscope
Optical microscope

Expertise

		Main Expertises
Beyond CMOS	Neuromorphic Computing	Coordinator of large German project “NEUROSYS”: Neuromorphic Hardware for Autonomous Artificial Intelligence Systems
	Phonon engineering	x
	Small slope switches-NW/TFET/NEMS	x
	Alternative materials-2D layers	2D materials based devices and characterization Participant in: Graphene Flagship 2D Experimental Pilot line other EU/national projects
	Novel devices for ultra-low power	x
	1D	x
	Quantum Technologies & Very low temperature electronics	Quantum Photonics
More Moore	Logic Nanodevices& circuits	Transistors Inverters Ring oscillators High k-dielectrics
	Memories	Non-volatile memory devices
	Very low power devices	x
	High temperature electronics	x
More than Moore	micro-nano-bio Sensors & Systems	Photodetectors Pressure sensors Humidity sensors Strain sensors
	Energy Harvesting	x
	RF devices & circuits	RF Transistors RF diodes Characterization up to 11GHz
	Photonics devices	Silicon and silicon nitride photonics 2D photodetectors Multispectral photodetectors High speed photodetection
	Power devices	x
	Flexible electronics	Flexible electronics with 2D materials
Smart systems& Systems design	Smart systems	x
Smart systems& Systems design	Systems design	x

Research interests

		Research interests
Beyond CMOS	Neuromorphic Computing	2D Material based Memristors Photonic Neuromorphic Circuits Technology transfer
	Phonon engineering	x
	Small slope switches-NW/TFET/NEMS	x
	Alternative materials-2D layers	Graphene Transistion metal dichalcogenides Dielectric deposition on 2D materials Electronics, Photonics, Sensors, RF, Flexible Electronics
	Novel devices for ultra-low power	x
	1D	x
	Quantum Technologies & Very low temperature electronics	Photonic Integrated Circuits
More Moore	Logic Nanodevices& circuits	Electrical contacts to 2D materials 2D material based hot electron transistors Flexible devices Ultimate scaling of 2D material-based FETs
	Memories	Graphene non-volatile memory device (Non-volatile) memristive elements
	Very low power devices	x
	High temperature electronics	x
More than Moore	micro-nano-bio Sensors & Systems	2D material based: MEMS(strain sensors, pressure sensors) 2D NEMS 2D material photodiodes 2D material spectral Photodetectors Flexible sensors
	Energy Harvesting	Perovskite based solar cells on chip RF / THz rectennas
	RF devices & circuits	Graphene-based diodes and RF circuits Graphene THz antennas 2D RF transistors and circuits
	Photonics devices	PICs IR detectors Graphene photodetectors 2D material-based photodetectors Si and SiN photonics
	Power devices	x
	Flexible electronics	2D materials based flexible electronics Hall sensors Photodetectors Integrated circuits
Smart systems& Systems design	Smart systems	Flexible integrated systems with 2D materials
Smart systems& Systems design	Systems design	x

Chair for Micro – and Nanoelectronics at RWTH Aachen University

Chair for Micro – and Nanoelectronics at RWTH Aachen University

SiNANO Institute