University of Twente

Contact persons:

Ray Hueting

University of Twente
Drienerlolaan 5
7522 NB Enschede

Netherlands

Equipment / Facilities

Processing platform

The University of Twente has a Nanolab facility comprising a 1200 m² clean room for Nanotechnology experimentation with world class equipment.

Available equipment :

Many tools including deposition tools (ALD, CVD and PLD), e-beam lithography, nanoimprint, implanter, sputter tools
Many physical characterization tools including HRSEM, Dualbeam FIB, TEM, XRD, XPS, nanoprober, AFM, In situ spectroscopy in CVD/ALD

We are fully equipped for:

Modelling platform

Silvaco, Synopsys, COMSOL

Characterization platform

Expertise

		Main Expertises
Beyond CMOS	Neuromorphic Computing	Device architectures Device fabrication, Network architectures, AI
	Phonon engineering	x
	Small slope switches-NW/TFET/NEMS	Ferroelectrics-based devices; Piezoelectric-based devices; Device architecture Device fabrication Device modeling
	Alternative materials-2D layers	Atomic layer deposition of ultra-thin films (insulators, semiconductors, conductors)
	Novel devices for ultra-low power	Ferroelectrics-based devices; Piezoelectric-based devices; Device architecture Device fabrication Device modeling
	1D	x
	Quantum Technologies & Very low temperature electronics	Single-atom transistors (fabrication and cryogenic testing)
More Moore	Logic Nanodevices& circuits	C-V and I-V characterization; Interface state measurement, reliability
	Memories	x
	Very low power devices	x
	High temperature electronics	x
More than Moore	micro-nano-bio Sensors & Systems	Lab-on-chip, Organ-on-chip: system architecture, prototyping, applications
	Energy Harvesting	• PV on chip
	RF devices & circuits	RF MEMS device design, fabrication and characterization
	Photonics devices	Photodiodes, SI light emitters, Si optocouplers
	Power devices	Si, GaN device architecture and characterization
	Flexible electronics	P3HT OFETs & VOFETs (fabrication) Device physics, characterization, Modelling, and TCAD
Smart systems& Systems design	Smart systems	x
Smart systems& Systems design	Systems design	x

Research interests

		Research interests
Beyond CMOS	Neuromorphic Computing	Device architectures Device fabrication, Network architectures, AI
	Phonon engineering	x
	Small slope switches-NW/TFET/NEMS	Ferroelectrics-based devices; Piezoelectric-based devices; Device architecture Device fabrication Device modeling
	Alternative materials-2D layers	Atomic layer deposition of ultra-thin films (insulators, semiconductors, conductors)
	Novel devices for ultra-low power	Ferroelectrics-based devices; Piezoelectric-based devices; Device architecture Device fabrication Device modeling
	1D	x
	Quantum Technologies & Very low temperature electronics	Single-atom transistors (fabrication and cryogenic testing
More Moore	Logic Nanodevices& circuits	C-V and I-V characterization; Interface state measurement, reliability
	Memories	x
	Very low power devices	x
	High temperature electronics	x
More than Moore	micro-nano-bio Sensors & Systems	Lab-on-chip, Organ-on-chip: system architecture, prototyping, applications
	Energy Harvesting	PV on chip
	RF devices & circuits	RF MEMS device design, fabrication and characterization
	Photonics devices	Photodiodes, SI light emitters, Si optocouplers
	Power devices	Si, GaN device architecture and characterization
	Flexible electronics	x
Smart systems& Systems design	Smart systems	x
Smart systems& Systems design	Systems design	x