Royal Institute of Technology

KTH Royal Institute of Technology

Contact persons:

Mikael Östling, Per-Erik Hellström

KTH Royal Institute of Technology
SE-100 44,

Stockholm,

Sweden

Equipment / Facilities

Processing platform

1300 m2 clean room handling up to 200 mm wafer size
FD-SOI CMOS technology platform on 100 mm wafers
SiC bipolar/MOSFET technology platform on 100 mm wafers
MEMS processing platform

http://www.myfab.se/

Major Equipment:
AMAT P5000: RIE SiO2, SiN
AMAT P5000: RIE Si, SiGe, SiC
AMAT P5000: RIE AL, TiN, TiW
AMAT P5000: PECVD SIO2, SiN
AMAT Endura: PVD Ni, TiW, Al
AMAT Centura: Deep Silicon Etch
MATTSON RTP: Annealing, Oxidation
ASM Epsilon2000: CVD Si, SiGe, Ge, GeSn
Nikon NSR TFHi12: I-line (365 nm) stepper lithography
BENEQ TFS200: ALD SiO2, TiN, AL2O3, HfO2, Tm2O3
IPEC/Axus Avanti 472: CMP SiO2, SiC
Thermco: Furnaces Anneals N2, O2, N20
Aixtron 200/4: MOVPE GaAs,InP, InAs, GaSb

Modelling platform

Process Design Kit (Cadence environment) for KTH’s FD SOI CMOS Technology.
Synopsys Sentaurus TCAD Simulation

Characterization platform

Semi-automatic probe station for on wafer electrical characterization (Keithley 4200)
High Temperature (up to 500 °C) on wafer electrical characterization
Physical Characterization: HRXRD, HRSEM, TEM, Spectroscopic Ellipsometry, AFM

Expertise

		Main Expertises
Beyond CMOS	Neuromorphic Computing	x
	Phonon engineering	x
	Small slope switches-NW/TFET/NEMS	x
	Alternative materials-2D layers	x
	Novel devices for ultra-low power	x
	1D	x
	Quantum Technologies & Very low temperature electronics	x
More Moore	Logic Nanodevices& circuits	FD SOI CMOS technology platform SiGe and Ge MOSFET devices
	Memories	x
	Very low power devices	x
	High temperature electronics	x
More than Moore	micro-nano-bio Sensors & Systems	Implantable bio-sensors Si nanowire top-down fabrication
	Energy Harvesting	Low power circuit design
	RF devices & circuits	Low power circuit design
	Photonics devices	III-V epitaxy (MOVPE) of GaAs and InP-based materials and device structures Edge-and surface-emitting lasers and detectors Heterogeneous integration
	Power devices	SiC BJT and MOSFETs
	Flexible electronics	Graphene based super capacitors
Smart systems& Systems design	Smart systems
Smart systems& Systems design	Systems design	Feasibility study, Architecture partition, Design hardware/software, Test and Validation

Research interests

		Research interests
Beyond CMOS	Neuromorphic Computing	x
	Phonon engineering	x
	Small slope switches-NW/TFET/NEMS	x
	Alternative materials-2D layers	x
	Novel devices for ultra-low power	x
	1D	x
	Quantum Technologies & Very low temperature electronics	x
More Moore	Logic Nanodevices& circuits	Monolithic 3D integration High mobility channels, gate stacks
	Memories	x
	Very low power devices	x
	High temperature electronics	x
More than Moore	micro-nano-bio Sensors & Systems	Biomedical Integration of sensors with CMOS
	Energy Harvesting	Integration with CMOS
	RF devices & circuits	x
	Photonics devices	Integrated light sources on SOI and bulk silicon substrates High-power photonic crystal-confined lasers Single-photon emitters Solar cell structures
	Power devices	High temperature applications High power applications
	Flexible electronics	x
Smart systems& Systems design	Smart systems	x
Smart systems& Systems design	Systems design	Biomedical

Royal Institute of Technology

KTH Royal Institute of Technology

SiNANO Institute